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Scanning electron beam microscope

Scanning electron beam microscope

Type
Tescan LYRA XMU
Category
Surface analyzer
Responsible
prof. Ing. Radimír VRBA, CSc.
LYRA XMU Tescan electron microscope. The microscope uses the high brightness auto-emission Schottky cathode and it is intended for the high-resolution imaging of both conducting and non-conducting samples. This system is integrated with a focused Ga ion beam (FIB). The model features an XM chamber for a comfortable investigation and positioning of the sample thanks to a fully-motorized five-axes manipulator and ideal geometry for both EDX and EBSD. First-class scintillation YAG-based detectors. Investigation of non-conducting samples in the low-vacuum mode and excellent results on magnetic samples. Integrated active cushioning for an efficient reduction of vibrations in the laboratory.